Title :
Love-wave biosensors using cross-linked polymer waveguides on LiTaO 3 substrates
Author :
Bender, F. ; Cernosek, R.W. ; Josse, F.
Author_Institution :
Dept. of Microsensor R&D, Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
9/14/2000 12:00:00 AM
Abstract :
The design and performance of Love-wave sensors using crosslinked poly(methyl methacrylate) waveguides of thicknesses of 0.3 to 3.21 μm on LiTaO3 substrates are described. It is found that this layer-substrate combination provides sufficient waveguidance and electrical isolation of the interdigital transducers from the liquid environment to achieve low acoustic loss and distortion. In biosensing experiments, mass sensitivity up to 1420 Hz(ng/mm2) is demonstrated
Keywords :
Love waves; acoustic waveguides; biosensors; 0.3 to 3.2 mum; LiTaO3; LiTaO3 substrates; Love-wave biosensors; acoustic loss; cross-linked polymer waveguides; electrical isolation; interdigital transducers; mass sensitivity; poly(methyl methacrylate);
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20001137
