Magnetic properties of Fe(N)/NiFe(N) sputtered on sloping surfaces

Author

Jones, R.E., Jr. ; Spector, C.J. ; Williams, J.L. ; Lin, C.J.

Author_Institution

Carnegie Mellon Univ., Pittsburgh, PA, USA

Volume

32

Issue

5

fYear

1996

fDate

9/1/1996 12:00:00 AM

Firstpage

4588

Lastpage

4590

Abstract

The magnetic properties of sputtered iron-based films can be significantly different when deposited on sloping surfaces. For example, anisotropy fields, H_k, and easy axis coercivities, H_ce, of Fe(N)/NiFe(N) films in this study were as much as two orders of magnitude higher on 60° tilted surfaces than on flat surfaces. The use of high substrate bias during deposition effectively lessened increases of H_k and H_ce. These parameters were largely independent of the nitrogen content of the films, implying the observed increases were not strongly dependent on magnetostriction. The large H_k and the H_ce values are believed to be caused by a shape anisotropy associated with angle-of-incidence deposition and film crystallite morphology

Keywords

Permalloy; coercive force; crystal morphology; ferromagnetic materials; iron compounds; magnetic anisotropy; magnetic multilayers; soft magnetic materials; sputtered coatings; 60° tilted surfaces; Fe(N)/NiFe(N); FeN-FeNiN; angle-of-incidence deposition; anisotropy fields; deposition; easy axis coercivities; film crystallite morphology; high substrate bias; magnetic properties; magnetostriction; shape anisotropy; sloping surface sputtering; Anisotropic magnetoresistance; Coercive force; Crystallization; Magnetic films; Magnetic properties; Magnetostriction; Nitrogen; Shape; Substrates; Surface morphology;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.539088

Filename

539088