Title :
High-Q SAW filter and submicron process technology for timing extraction in high bit rate optical communications system
Author :
Hikita, Mitsutaka ; Asai, Kenngo ; Isobe, Atsushi
Author_Institution :
Central Res. Lab., Hitachi Ltd., Tokyo, Japan
fDate :
6/1/1998 12:00:00 AM
Abstract :
A new surface acoustic wave (SAW) filter configuration that consists of 3λ/8-wide meander-type electrodes and 3λ/8-wide excitation electrodes on ST-cut quartz was designed for use in a 2.5-Gb/s optical communications system. New submicron process techniques using the phase shifting method as well as several types of resist were investigated to fabricate this filter. It had an insertion loss of less than 14 dB and a Q of about 700, and satisfied all required system specifications over a temperature range from 0 to 60°C
Keywords :
electrodes; integrated optics; optical communication equipment; optical fabrication; photoresists; surface acoustic wave filters; 0 to 60 C; 2.5 Gbit/s; Gb/s optical communications system; ST-cut quartz; excitation electrodes; high bit rate optical communications system; high-Q SAW filter; insertion loss; meander-type electrodes; optical fabrication; phase shifting method; resist; submicron process techniques; submicron process technology; surface acoustic wave filter configuration; system specifications; timing extraction; Acoustic waves; Electrodes; Optical design; Optical fiber communication; Optical filters; Optical surface waves; Resists; SAW filters; Surface acoustic waves; Timing;
Journal_Title :
Lightwave Technology, Journal of
