DocumentCode
1389261
Title
A phase-space particles motion scheme for electron kinetic simulation
Author
Mankelevich, Y.A. ; Rakhimov, Alexandr T. ; Suetin, Nickolay V.
Author_Institution
Dept. of Microelectron., Moscow State Univ., USSR
Volume
19
Issue
3
fYear
1991
fDate
6/1/1991 12:00:00 AM
Firstpage
520
Lastpage
524
Abstract
A phase-space particle motion scheme (PSPMS) for electron kinetic simulation is proposed. This scheme is based on the convenient representation of electron motion in phase space using the particles method. PSPMS offers the possibility of calculating the electron energy distribution function (EEDF) much faster than by conventional methods. PSPMS electron calculation is shown to match convective scheme and Monte Carlo simulations of swarms in the uniform electric field and the cathode fall (CF). PSPMS may be used for a self-consistent model of low-pressure glow discharge construction
Keywords
glow discharges; plasma transport processes; Monte Carlo simulations; cathode fall; electric field; electron energy distribution function; electron kinetic simulation; electron motion; low-pressure glow discharge; phase-space particles motion scheme; self-consistent model; Acceleration; Boltzmann equation; Cathodes; Distribution functions; Electrons; Glow discharges; Kinetic theory; Nuclear physics; Plasma applications; Plasma simulation;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.87232
Filename
87232
Link To Document