DocumentCode :
1389261
Title :
A phase-space particles motion scheme for electron kinetic simulation
Author :
Mankelevich, Y.A. ; Rakhimov, Alexandr T. ; Suetin, Nickolay V.
Author_Institution :
Dept. of Microelectron., Moscow State Univ., USSR
Volume :
19
Issue :
3
fYear :
1991
fDate :
6/1/1991 12:00:00 AM
Firstpage :
520
Lastpage :
524
Abstract :
A phase-space particle motion scheme (PSPMS) for electron kinetic simulation is proposed. This scheme is based on the convenient representation of electron motion in phase space using the particles method. PSPMS offers the possibility of calculating the electron energy distribution function (EEDF) much faster than by conventional methods. PSPMS electron calculation is shown to match convective scheme and Monte Carlo simulations of swarms in the uniform electric field and the cathode fall (CF). PSPMS may be used for a self-consistent model of low-pressure glow discharge construction
Keywords :
glow discharges; plasma transport processes; Monte Carlo simulations; cathode fall; electric field; electron energy distribution function; electron kinetic simulation; electron motion; low-pressure glow discharge; phase-space particles motion scheme; self-consistent model; Acceleration; Boltzmann equation; Cathodes; Distribution functions; Electrons; Glow discharges; Kinetic theory; Nuclear physics; Plasma applications; Plasma simulation;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/27.87232
Filename :
87232
Link To Document :
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