• DocumentCode
    1389261
  • Title

    A phase-space particles motion scheme for electron kinetic simulation

  • Author

    Mankelevich, Y.A. ; Rakhimov, Alexandr T. ; Suetin, Nickolay V.

  • Author_Institution
    Dept. of Microelectron., Moscow State Univ., USSR
  • Volume
    19
  • Issue
    3
  • fYear
    1991
  • fDate
    6/1/1991 12:00:00 AM
  • Firstpage
    520
  • Lastpage
    524
  • Abstract
    A phase-space particle motion scheme (PSPMS) for electron kinetic simulation is proposed. This scheme is based on the convenient representation of electron motion in phase space using the particles method. PSPMS offers the possibility of calculating the electron energy distribution function (EEDF) much faster than by conventional methods. PSPMS electron calculation is shown to match convective scheme and Monte Carlo simulations of swarms in the uniform electric field and the cathode fall (CF). PSPMS may be used for a self-consistent model of low-pressure glow discharge construction
  • Keywords
    glow discharges; plasma transport processes; Monte Carlo simulations; cathode fall; electric field; electron energy distribution function; electron kinetic simulation; electron motion; low-pressure glow discharge; phase-space particles motion scheme; self-consistent model; Acceleration; Boltzmann equation; Cathodes; Distribution functions; Electrons; Glow discharges; Kinetic theory; Nuclear physics; Plasma applications; Plasma simulation;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.87232
  • Filename
    87232