The measurement of surface resistivity

Over a period of about 40 years no significant changes have been made in the methods recommended for the determination of the surface resistivity of dielectric materials. Recent work has shown that results obtained by these methods may not be accurate. The errors inherent in measurements of surface resistivity are caused by the shunt resistance through the bulk of the material and by contact resistance at the electrode-surface-film interface. The sources of these errors are discussed and methods of reducing them are recommended.