Geometrical error compensation of precision motion systems using radial basis function

This paper describes a new method for geometrical error compensation of precision motion systems. The compensation is carried out with respect to an overall geometrical error model which is constructed from the individual error components associated with each axis of the machine. These error components are modeled using radial basis functions (RBFs), thus dispensing with the conventional look-up table. The adequacy and clear benefits of the proposed approach are illustrated from an application to an XY table