Miniaturization of sensors and influence of their thermal noise on measurement accuracy

Author

Platonov, Anatoliy A. ; Szabatin, Jerzy ; Melnikov, Valeriy E.

Author_Institution

Inst. of Electron. Syst., Warsaw Univ. of Technol., Poland

Volume

49

Issue

5

fYear

2000

fDate

10/1/2000 12:00:00 AM

Firstpage

1018

Lastpage

1022

Abstract

The influence of thermal fluctuations in the mechanical and electrical elements of microsensors on their measurement accuracy is considered. The limits of the minimum attainable measurement uncertainty as a function of the miniaturization degree of the sensor are evaluated. Possibilities of improvement of the sensor performance through optimal fitting of the sensor and ADC parameters are examined. Recommendations for an optimal choice of parameters of the analog part of the sensor as well of the ADC resolution are given. The analysis is based on the information-energetic theory of measurements, and on general results of statistical physics

Keywords

measurement theory; measurement uncertainty; microsensors; statistical analysis; thermal noise; ADC resolution; analog part; information-energetic theory; measurement accuracy; measurement uncertainty; microsensors; optimal fitting; statistical physics; thermal fluctuations; thermal noise; Electromechanical sensors; Fluctuations; Intelligent sensors; Mechanical sensors; Mechanical variables measurement; Microsensors; Noise measurement; Sensor phenomena and characterization; Sensor systems; Thermal sensors;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.872923

Filename

872923