• DocumentCode
    1389921
  • Title

    Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering

  • Author

    Gokce, Sertan Kutal ; Holmstrom, Sven ; Hibert, Cyrille ; Olcer, Selim ; Bowman, David ; Urey, Hakan

  • Author_Institution
    Dept. of Electr. Eng., Koc Univ., Istanbul, Turkey
  • Volume
    20
  • Issue
    1
  • fYear
    2011
  • Firstpage
    15
  • Lastpage
    17
  • Abstract
    A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 μm out of plane and 34 μm in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
  • Keywords
    beam steering; laser applications in medicine; laser arrays; microfabrication; microlenses; 2D actuation; MLA; laser beam steering; polymer microlens array; two-dimensional MEMS stage; Beam steering; comb drive; endoscopic imaging; microelectromechanical systems (MEMS) stage; microlens array (MLA);
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2010.2090507
  • Filename
    5648319
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1389921