Title :
Fabrication and Analysis of a MEMS NIR Fabry–Pérot Interferometer
Author :
Russin, Timothy J. ; Kerber, Maxwell ; Russin, Alicia ; Wang, Andrew ; Waters, Richard
Author_Institution :
Adv. Integrated Circuit Technol. Branch, Space & Naval Warfare Syst. Center Pacific, San Diego, CA, USA
Abstract :
We report the design and fabrication of a tunable MEMS Fabry-Pérot étalon for use in microscale spectroscopic applications. The reflective elements of the interferometer are dielectric mirror stacks optimized for 1500-nm light and the tunability arises via capacitive attraction of a translatable mirror on a spring. The mirror reflectivity was measured to be 97.3%, corresponding to a calculated finesse of 115, while the measured linewidth and FSR are 70 cm-1 and 334 cm-1, respectively, corresponding to a measured finesse of 5.
Keywords :
Fabry-Perot interferometers; microfabrication; micromirrors; MEMS Fabry-Pérot étalon; MEMS NIR Fabry-Pérot interferometer; design; fabrication; microscale spectroscopic application; mirror reflectivity; reflective element; translatable mirror; Electrodes; Gold; Micromechanical devices; Mirrors; Optical interferometry; Silicon; Springs; Fabry–Pérot interferometers; Raman spectroscopy; tunable filters;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2011.2174413
