Fabrication and Analysis of a MEMS NIR Fabry–Pérot Interferometer

Author

Russin, Timothy J. ; Kerber, Maxwell ; Russin, Alicia ; Wang, Andrew ; Waters, Richard

Author_Institution

Adv. Integrated Circuit Technol. Branch, Space & Naval Warfare Syst. Center Pacific, San Diego, CA, USA

Volume

21

Issue

1

fYear

2012

Firstpage

181

Lastpage

189

Abstract

We report the design and fabrication of a tunable MEMS Fabry-Pérot étalon for use in microscale spectroscopic applications. The reflective elements of the interferometer are dielectric mirror stacks optimized for 1500-nm light and the tunability arises via capacitive attraction of a translatable mirror on a spring. The mirror reflectivity was measured to be 97.3%, corresponding to a calculated finesse of 115, while the measured linewidth and FSR are 70 cm^-1 and 334 cm^-1, respectively, corresponding to a measured finesse of 5.

Keywords

Fabry-Perot interferometers; microfabrication; micromirrors; MEMS Fabry-Pérot étalon; MEMS NIR Fabry-Pérot interferometer; design; fabrication; microscale spectroscopic application; mirror reflectivity; reflective element; translatable mirror; Electrodes; Gold; Micromechanical devices; Mirrors; Optical interferometry; Silicon; Springs; Fabry–Pérot interferometers; Raman spectroscopy; tunable filters;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2011.2174413

Filename

6095573