Title :
Integrated micro-optomechanical laser beam deflector
Author :
Petroz, K. ; Grateau, H. ; Oilier, E. ; Mottier, P.
Author_Institution :
Lab d´´Electron. et de Technol. de l´´Inf., CEA, Centre d´´Etudes Nucleaires de Grenoble, France
fDate :
4/30/1998 12:00:00 AM
Abstract :
A laser beam microdeflector which is fully integrated on a silicon substrate is presented. The design combines a steering system of cylindrical microlenses and a set of electrostatic combs. Both mechanical and optical parts are etched into a silica layer to provide a simple technological process and widen the operational wavelength range. Furthermore, the design, associated with silicon surface micromachining technology, enables more than 700 chips to be produced on a 100 mm diameter wafer
Keywords :
electrostatic devices; integrated optics; laser accessories; lenses; microactuators; micromachining; optical fabrication; silicon; Si substrate; Si surface micromachining technology; Si-SiO2; SiO2; cylindrical microlenses; electrostatic combs; integrated laser beam deflector; laser beam deflector; micro-optomechanical deflector; microdeflector; silica layer; steering system;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19980594
