Title :
Dark current optimisation for MOVPE grown 2.5 μm wavelength InGaAs photodetectors
Author :
Hondt, M.D. ; Moerman, I. ; Demeester, P.
Author_Institution :
Dept. of Inf. Technol., IMEC, Gent, Belgium
fDate :
4/30/1998 12:00:00 AM
Abstract :
We have fabricated 2.5μmn InGaAs photodetectors, which exhibit state-of-the-art dark current densities (1O9A/cm2 at 150K, -1OmV). The major parameter was the doping level of the absorbing layer. Measuring the dark current against temperature allows us to separate it into three different contributions, Also, the spectral response of the photodetectors was discussed as a function of the absorbing layer´s doping level
Keywords :
III-V semiconductors; dark conductivity; doping profiles; gallium arsenide; indium compounds; photodetectors; semiconductor epitaxial layers; semiconductor growth; vapour phase epitaxial growth; -10 mV; 150 K; 2.5 micrometre; III-V semiconductors; InGaAs; MOVPE; absorbing layer; dark current optimisation; doping level; photodetectors; spectral response;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19980560