DocumentCode :
1391412
Title :
Dark current optimisation for MOVPE grown 2.5 μm wavelength InGaAs photodetectors
Author :
Hondt, M.D. ; Moerman, I. ; Demeester, P.
Author_Institution :
Dept. of Inf. Technol., IMEC, Gent, Belgium
Volume :
34
Issue :
9
fYear :
1998
fDate :
4/30/1998 12:00:00 AM
Firstpage :
910
Lastpage :
912
Abstract :
We have fabricated 2.5μmn InGaAs photodetectors, which exhibit state-of-the-art dark current densities (1O9A/cm2 at 150K, -1OmV). The major parameter was the doping level of the absorbing layer. Measuring the dark current against temperature allows us to separate it into three different contributions, Also, the spectral response of the photodetectors was discussed as a function of the absorbing layer´s doping level
Keywords :
III-V semiconductors; dark conductivity; doping profiles; gallium arsenide; indium compounds; photodetectors; semiconductor epitaxial layers; semiconductor growth; vapour phase epitaxial growth; -10 mV; 150 K; 2.5 micrometre; III-V semiconductors; InGaAs; MOVPE; absorbing layer; dark current optimisation; doping level; photodetectors; spectral response;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:19980560
Filename :
682854
Link To Document :
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