DocumentCode
1394836
Title
Solid state optical gyrometer integrated on silicon
Author
Mottier, P. ; Pouteau, P.
Author_Institution
Lab d´´Electron. et de Technol. de l´´Inf., CEA, Centre d´´Etudes Nucleaires de Grenoble, France
Volume
33
Issue
23
fYear
1997
fDate
11/6/1997 12:00:00 AM
Firstpage
1975
Lastpage
1977
Abstract
The authors have demonstrated for the first time the feasibility of solid state optical gyrometers. They consist of a silica waveguide coil fully integrated on a silicon substrate and operating at 850 nm wavelength. A typical sensitivity of 1°/s-1 and a full linearity at least between -900 and 900°/s-1 have been obtained so far. Thus first results could open the way to further improvements in order to achieve low cost rotation sensors
Keywords
angular measurement; elemental semiconductors; fibre optic sensors; gyroscopes; integrated optics; silicon; 850 nm; Si; linearity; rotation sensors; sensitivity; solid state optical gyrometers; waveguide coil;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19971319
Filename
640475
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