Title :
Spot-size converter integrated laser diodes (SS-LDs)
Author :
Itaya, Yoshio ; Tohmori, Yuichi ; Toba, Hiromu
Author_Institution :
NTT Opto-Electron. Labs., Kanagawa, Japan
fDate :
6/1/1997 12:00:00 AM
Abstract :
A laser diode integrated with a spot-size converter has been developed for low cost optical modules. This device involves a mechanism that matches its optical field with fiber or planar lightwave circuits (PLC). This improves the alignment tolerance of the optical coupling and allows for an easy passive alignment approach. This device was fabricated on a 2-in substrate using MOVPE for crystal growth, stepper for photolithography and dry etching for mesa formation, which were all fit for mass production. Thus, the cost of the device is reduced. This device offers high coupling efficiency with single-mode fibers and high reliability, so that it can be widely implemented in coming advanced optical networks
Keywords :
etching; integrated optics; integrated optoelectronics; modules; optical fabrication; optical fibre couplers; optical transmitters; photolithography; semiconductor device packaging; semiconductor device reliability; semiconductor growth; semiconductor lasers; vapour phase epitaxial growth; 2 in; MOVPE crystal growth; advanced optical networks; alignment tolerance; dry etching; easy passive alignment approach; high coupling efficiency; high reliability; laser diode integration; low cost optical modules; mesa formation; optical coupling; optical field; photolithography; planar lightwave circuits; single-mode fiber coupling; spot-size converter integrated laser diodes; substrate; Circuits; Costs; Diode lasers; Epitaxial growth; Integrated optics; Optical coupling; Optical devices; Optical fiber devices; Optical fiber networks; Programmable control;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.640651
