Title :
Uniform electron emission from a nitrogen-doped diamond-based electron emitter fabricated by the sintering technique
Author :
Yamada, Takatoshi ; Sawabe, Atsuhito ; Koizumi, Satoshi ; Itoh, Junji ; Okano, Ken
Author_Institution :
Dept. of Electr. Eng. & Electron., Aoyama Gakuin Univ., Tokyo, Japan
Abstract :
A nitrogen (N)-doped diamond-based electron emitter has been fabricated by the sintering technique prior to the chemical vapor deposition process in order to improve the uniformity. There are no spatial differences in reflective electron energy loss spectra (REELS) from the diamond-based electron emitter, suggesting that uniform surface conditions are obtained. The uniform electron emission from the obtained electron emitter is confirmed through emission current vs anode voltage characteristics measurements. It seems that the uniformity of the emitter surface results in uniform electron emission from the diamond electron emitter.
Keywords :
cathodes; chemical vapour deposition; diamond; electron energy loss spectra; electron field emission; elemental semiconductors; nitrogen; sputter deposition; surface composition; vacuum microelectronics; C:N; REELS; anode voltage; chemical vapor deposition; cold cathodes; diamond:N electron emitter; emission current; reflective electron energy loss spectra; sintering; uniform electron emission; uniform surface conditions; Cathodes; Chemical vapor deposition; Electron emission; Electron guns; Fabrication; Microelectronics; Nitrogen; Silicon compounds; Substrates; Surface morphology;
Journal_Title :
Electron Device Letters, IEEE
