• DocumentCode
    1395420
  • Title

    Macroparticle filtering of high-current vacuum arc plasmas

  • Author

    Schülke, Thomas ; Anders, André ; Siemroth, Peter

  • Author_Institution
    Fraunhofer-Inst. for Mater. Phys. & Surface Eng., Dresden, Germany
  • Volume
    25
  • Issue
    4
  • fYear
    1997
  • fDate
    8/1/1997 12:00:00 AM
  • Firstpage
    660
  • Lastpage
    664
  • Abstract
    The transport of vacuum arc plasmas through a 90° curved magnetic macroparticle filter was investigated using a high-current pulsed arc source with a carbon cathode. The peak arc current was in the kiloampere range, exceeding considerably the level of what has been reported in the literature. The main question investigated was whether magnetic macroparticle filters could be scaled up while maintaining the transport efficiency of small filters. In front of the cathode, we found that arc current dependent total ion saturation currents were in the range from 10% to 23% of the arc current. The best relative transmission was 25% (time integrated output/time integrated input) at a duct wall bias of 12.5 V and at an axial magnetic field of about 100 mT. The measured relative transmission of the used high-current arrangement is comparable to what has been observed with other low-current filters. The absolute measurable ion saturation currents at the filter exit reached 70 A at an arc current of about 1000 A
  • Keywords
    arcs (electric); filters; plasma density; plasma deposition; plasma diagnostics; plasma production; plasma transport processes; vacuum arcs; 100 mT; 1000 A; 12.5 V; 70 A; C; C cathode; arc current; axial magnetic field; curved magnetic macroparticle filter; duct wall bias; filter exit; high-current arrangement; high-current pulsed arc source; high-current vacuum arc plasmas; ion saturation currents; kiloampere range; low-current filters; macroparticle filtering; magnetic macroparticle filters; peak arc current; relative transmission; transport efficiency; Cathodes; Ducts; Filtering; Filters; Magnetic field measurement; Magnetic separation; Plasma sources; Plasma transport processes; Saturation magnetization; Vacuum arcs;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.640681
  • Filename
    640681