DocumentCode
1395420
Title
Macroparticle filtering of high-current vacuum arc plasmas
Author
Schülke, Thomas ; Anders, André ; Siemroth, Peter
Author_Institution
Fraunhofer-Inst. for Mater. Phys. & Surface Eng., Dresden, Germany
Volume
25
Issue
4
fYear
1997
fDate
8/1/1997 12:00:00 AM
Firstpage
660
Lastpage
664
Abstract
The transport of vacuum arc plasmas through a 90° curved magnetic macroparticle filter was investigated using a high-current pulsed arc source with a carbon cathode. The peak arc current was in the kiloampere range, exceeding considerably the level of what has been reported in the literature. The main question investigated was whether magnetic macroparticle filters could be scaled up while maintaining the transport efficiency of small filters. In front of the cathode, we found that arc current dependent total ion saturation currents were in the range from 10% to 23% of the arc current. The best relative transmission was 25% (time integrated output/time integrated input) at a duct wall bias of 12.5 V and at an axial magnetic field of about 100 mT. The measured relative transmission of the used high-current arrangement is comparable to what has been observed with other low-current filters. The absolute measurable ion saturation currents at the filter exit reached 70 A at an arc current of about 1000 A
Keywords
arcs (electric); filters; plasma density; plasma deposition; plasma diagnostics; plasma production; plasma transport processes; vacuum arcs; 100 mT; 1000 A; 12.5 V; 70 A; C; C cathode; arc current; axial magnetic field; curved magnetic macroparticle filter; duct wall bias; filter exit; high-current arrangement; high-current pulsed arc source; high-current vacuum arc plasmas; ion saturation currents; kiloampere range; low-current filters; macroparticle filtering; magnetic macroparticle filters; peak arc current; relative transmission; transport efficiency; Cathodes; Ducts; Filtering; Filters; Magnetic field measurement; Magnetic separation; Plasma sources; Plasma transport processes; Saturation magnetization; Vacuum arcs;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.640681
Filename
640681
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