Title :
Cost-Effective Silicon Vertical Diode Switch for Next-Generation Memory Devices
Author :
Lee, Kong-Soo ; Han, Jae-Jong ; Lim, Hanjin ; Nam, Seokwoo ; Chung, Chilhee ; Jeong, Hong-Sik ; Park, Hyunho ; Jeong, Hanwook ; Choi, Byoungdeog
Author_Institution :
Semicond. R&D Div., Samsung Electron. Co., Ltd., Hwasung, South Korea
Abstract :
In this letter, a cost-effective vertical diode scheme for next-generation memory devices, including phase-change memories (PCMs), is realized. After the contact formation for diodes with only one mask layer, an amorphous silicon (a-Si) film was deposited within the contacts using SiH4 ramp-up ambient in a conventional batch-type furnace in order to minimize the growth of native oxide. A deposition/etch-back/deposition scheme enabled us to achieve robust vertical diodes without any seams or interfacial oxide layer within the vertical diode pillars. Subsequent annealing at 600 °C provided solid-phase epitaxial alignment of the a-Si layer. An ideality factor revealed that the new scheme provided noticeable crystallinity of the silicon diodes. Moreover, the electrical characteristics of the diodes verified that the scheme was suitable for full operation of PCM devices.
Keywords :
annealing; etching; phase change memories; semiconductor diodes; semiconductor switches; solid phase epitaxial growth; Si; amorphous silicon film; annealing; contact formation; cost effective vertical diode switch; deposition-etch-back deposition scheme; next generation memory devices; phase change memory; solid phase epitaxial alignment; temperature 600 C; Epitaxial growth; Phase change materials; Random access memory; Semiconductor diodes; Silicon; Substrates; Switches; $hbox{SiH}_{4}$ ramp-up; Phase-change memory (PCM); solid-phase epitaxy (SPE); vertical diode switch;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2011.2175358
