• DocumentCode
    1396335
  • Title

    Three-dimensional p-adaptive computation of electrostatic force and energy

  • Author

    Wang, Jian-She ; Ida, Nathan

  • Author_Institution
    Ansys Inc., Canonsburg, PA, USA
  • Volume
    36
  • Issue
    4
  • fYear
    2000
  • fDate
    7/1/2000 12:00:00 AM
  • Firstpage
    728
  • Lastpage
    731
  • Abstract
    This paper discusses a p-adaptive finite element method for electrostatic force and energy computation based on the constitutive error criterion, and the implementation on a three-dimensional mixed polyhedral grid. The method is applied to simple MEMS structures and the convergence characteristic is demonstrated
  • Keywords
    convergence of numerical methods; electrostatics; error analysis; finite element analysis; micromechanical devices; MEMS structure; constitutive error; convergence; electrostatic energy; electrostatic force; p-adaptive finite element computation; three-dimensional mixed polyhedral grid; Boundary conditions; Capacitance; Computational modeling; Dielectrics; Electrodes; Electrostatics; Equations; Error analysis; Finite element methods; Voltage;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.877551
  • Filename
    877551