Title :
Three-dimensional p-adaptive computation of electrostatic force and energy
Author :
Wang, Jian-She ; Ida, Nathan
Author_Institution :
Ansys Inc., Canonsburg, PA, USA
fDate :
7/1/2000 12:00:00 AM
Abstract :
This paper discusses a p-adaptive finite element method for electrostatic force and energy computation based on the constitutive error criterion, and the implementation on a three-dimensional mixed polyhedral grid. The method is applied to simple MEMS structures and the convergence characteristic is demonstrated
Keywords :
convergence of numerical methods; electrostatics; error analysis; finite element analysis; micromechanical devices; MEMS structure; constitutive error; convergence; electrostatic energy; electrostatic force; p-adaptive finite element computation; three-dimensional mixed polyhedral grid; Boundary conditions; Capacitance; Computational modeling; Dielectrics; Electrodes; Electrostatics; Equations; Error analysis; Finite element methods; Voltage;
Journal_Title :
Magnetics, IEEE Transactions on
