DocumentCode
1396999
Title
Stable micro sized electret array produced by localised charging using a silicon shadow mask
Author
Liu, S.W. ; Shen, Z.Y. ; Lye, S.W. ; Miao, J.M.
Author_Institution
Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore, Singapore
Volume
7
Issue
11
fYear
2012
fDate
11/1/2012 12:00:00 AM
Firstpage
1094
Lastpage
1096
Abstract
A localised corona charging method is presented to produce a micro sized electret array through a shadow mask. It solves low charging efficiency and fast charge decay problems in the micro sized electrets charged by the conventional charging method. The enhancement in the properties of electret is realised by decreasing the electric field gradient causing charge leakage in the dielectric material during charging. Charging efficiency of 93% with 87% of its initial surface potential remained on the localised areas of 50%50%%m after 240 days.
Keywords
corona; dielectric materials; electrets; masks; silicon; Si; charge leakage; charging efficiency; conventional charging method; dielectric material; electric held gradient; fast charge decay problem; localised charging; localised corona charging method; silicon shadow mask; stable micro-sized electret array; surface potential; time 240 day;
fLanguage
English
Journal_Title
Micro & Nano Letters, IET
Publisher
iet
ISSN
1750-0443
Type
jour
DOI
10.1049/mnl.2012.0639
Filename
6409021
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