Design and Fabrication of Integrated Cryogenic Current Comparators

A cryogenic current comparator (CCC) is an instrument of great importance in electrical metrology, which provides a ratio of two currents with ultimate accuracy based on superconductivity. It is used for dc resistance calibration in many national metrology institutes. Conventional CCCs consist of multi-turn coils of wire windings, a multi-layered shield of superconductor foils and a separate SQUID sensor. This implementation results in a bulky device too massive to cool with a mechanical cryocooler, making a system inconvenient. A new implementation of CCC, an integrated CCC (ICCC) consisting of thin-film spiral coils, a thin-film superconducting shield and a SQUID sensor integrated on a single chip, enables a user-friendly system operated with a compact cryocooler. Prototype ICCC chips were designed and fabricated by using a superconducting Nb integrated circuit technology with chemical-mechanical polishing. The basic operation of the prototype ICCCs was confirmed by monitoring periodic flux-voltage characteristics of the SQUIDs.