Title :
Study of Giant Magnetostrictive Thin Films With Gas Sensitive Layer for Use as Gas Concentration Sensors
Author :
Wang, Fuji ; Jia, Zhenyuan ; Liu, Wei ; Liu, Huifang ; Zhao, Xiansong
Author_Institution :
Key Lab. for Precision & Non-traditional Machining Technol. of Minist. of Educ., Dalian Univ. of Technol., Dalian, China
fDate :
6/1/2012 12:00:00 AM
Abstract :
Giant magnetostrictive thin films of double layers with gas sensitive layers as the sensing element being used to develop a gas concentration sensor were proposed in this paper. The double layers giant magnetostrictive thin films with gas sensitive layer were prepared. A magneto-mechanical coupling model was developed based on the assumption that the magnetostriction effect is equivalent to the effect of a body force. These films were tested in a cantilever arrangement and end deflection was measured. The measurement showed that the experimental results were in good agreement with the calculation results, demonstrating that the coupling model developed was effective. Furthermore, the results indicated that the giant magnetostrictive thin films with gas sensitive layer were very useful for gas concentration sensors.
Keywords :
cantilevers; gas sensors; magnetostrictive devices; thin film sensors; cantilever arrangement; end deflection; gas concentration sensors; gas sensitive layer; giant magnetostrictive thin films; magneto-mechanical coupling model; Gas detectors; Magnetic films; Magnetic resonance; Magnetic sensors; Magnetostriction; Gas concentration detection; gas sensitive layer; giant magnetostrictive film; magneto-mechanical coupling;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2011.2177254