GaAs/GaAlAs graded refractive-index embedded core optical waveguides by OMCVD

Author

Yi-Yan, A. ; Colas, E. ; Bhat, R. ; Seto, M. ; Deri, R.J. ; Carru, H.

Author_Institution

Bellcore, Red Bank, NJ, USA

Volume

1

Issue

4

fYear

1989

fDate

4/1/1989 12:00:00 AM

Firstpage

80

Lastpage

82

Abstract

A description is given of graded refractive-index embedded core optical (GRECO) waveguides produced in GaAs/GaAlAs by sequential introduction of varying numbers of superlattice periods during metallorganic chemical vapor deposition (MOVCD) growth of the GaAs core material on patterned substrates. This technique offers the possibility of synthesizing the vertical index profile of the core and provides a built-in index difference for lateral confinement of guided modes. Fully planarized embedded waveguides fabricated with propagation losses of 1.5 dB/cm at a wavelength of 1.523 mu m are reported; their field distribution was analyzed using a finite-element technique.<>

Keywords

III-V semiconductors; aluminium compounds; chemical vapour deposition; gallium arsenide; gradient index optics; optical waveguides; optical workshop techniques; semiconductor growth; semiconductor superlattices; 1.5 dB; 1.523 micron; GaAs-GaAlAs; MOCVD; built-in index difference; core material; field distribution; finite-element technique; graded refractive-index embedded core optical waveguides; guided modes; lateral confinement; metallorganic chemical vapor deposition; patterned substrates; propagation losses; semiconductor; sequential introduction; superlattice periods; vertical index profile; Chemical vapor deposition; Gallium arsenide; Inorganic materials; Metallic superlattices; Optical materials; Optical refraction; Optical superlattices; Optical waveguides; Planar waveguides; Propagation losses;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.87909

Filename

87909