Monolithic and Two-Dimensional Integration of Silicon Photonic Microdisks With Microelectronics

Author

Zortman, William A. ; Trotter, Douglas C. ; Lentine, Anthony L. ; Robertson, Gideon ; Hsia, Alex ; Watts, Michael R.

Author_Institution

Appl. Photonic Microsyst., Sandia Nat. Labs., Albuquerque, NM, USA

Volume

4

Issue

1

fYear

2012

Firstpage

242

Lastpage

249

Abstract

A low-power silicon photonic disk resonator is monolithically and two-dimensionally integrated with complementary metal-oxide-semiconductor (CMOS) electronics. The results show direct integration with established CMOS manufacturing lines without changing either the CMOS or the photonic process stack. Comparable results for each integration method show subpicojoule per bit modulation and the potential for further reductions. The analysis reveals that the process of integration does not limit the performance of photonic or electronic components, and clear steps to use smaller drivers to achieve sub-50 fJ/bit at 10 Gb/s operation are available.

Keywords

CMOS integrated circuits; integrated optoelectronics; micro-optomechanical devices; micromechanical resonators; optical modulation; silicon-on-insulator; CMOS manufacturing; Si; bit modulation; bit rate 10 Gbit/s; complementary metal-oxide-semiconductor electronics; electronic components; low-power silicon photonic microdisk resonator; microelectronics; monolithic integration; photonic process stack; two-dimensional integration; Bit error rate; CMOS integrated circuits; Inverters; Modulation; Performance evaluation; Photonics; Silicon; 2-D integration; CMOS; monolithic integration; silicon photonic devices;

fLanguage

English

Journal_Title

Photonics Journal, IEEE

Publisher

ieee

ISSN

1943-0655

Type

jour

DOI

10.1109/JPHOT.2011.2180372

Filename

6107510