• DocumentCode
    1401505
  • Title

    CuO Nanowire-Based Humidity Sensor

  • Author

    Wang, Sheng-Bo ; Hsiao, Chih-Hung ; Chang, Shoou-Jinn ; Lam, Kin-Tak ; Wen, Kuo-Hsun ; Young, Sheng-Joue ; Hung, Shang-Chao ; Huang, Bohr-Ran

  • Author_Institution
    Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
  • Volume
    12
  • Issue
    6
  • fYear
    2012
  • fDate
    6/1/2012 12:00:00 AM
  • Firstpage
    1884
  • Lastpage
    1888
  • Abstract
    The authors report the growth of CuO nanowires on an oxidized Cu wire and the fabrication of a CuO nanowire humidity sensor. It was found that we could transform a Cu wire into CuO/Cu2O/Cu core-shell tri-layers covered with high density CuO nanowires by thermal annealing. It was also found that steady state currents of the sensor were about 2.44, 2.32, 2.23, and 2.15 μA , respectively, when measured with 20, 40, 60, and 80% relative humidity. Furthermore, it was found that sensing property of the fabricated device was stable and reproducible.
  • Keywords
    annealing; humidity sensors; nanowires; CuO-Cu2O-Cu; core shell tri-layer; nanowire based humidity sensor; oxidized wire; thermal annealing; Copper; Current measurement; Educational institutions; Humidity; Nanowires; Wires; Zinc oxide; CuO nanowire; humidity sensor;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2011.2180375
  • Filename
    6107512