DocumentCode
1401505
Title
CuO Nanowire-Based Humidity Sensor
Author
Wang, Sheng-Bo ; Hsiao, Chih-Hung ; Chang, Shoou-Jinn ; Lam, Kin-Tak ; Wen, Kuo-Hsun ; Young, Sheng-Joue ; Hung, Shang-Chao ; Huang, Bohr-Ran
Author_Institution
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Volume
12
Issue
6
fYear
2012
fDate
6/1/2012 12:00:00 AM
Firstpage
1884
Lastpage
1888
Abstract
The authors report the growth of CuO nanowires on an oxidized Cu wire and the fabrication of a CuO nanowire humidity sensor. It was found that we could transform a Cu wire into CuO/Cu2O/Cu core-shell tri-layers covered with high density CuO nanowires by thermal annealing. It was also found that steady state currents of the sensor were about 2.44, 2.32, 2.23, and 2.15 μA , respectively, when measured with 20, 40, 60, and 80% relative humidity. Furthermore, it was found that sensing property of the fabricated device was stable and reproducible.
Keywords
annealing; humidity sensors; nanowires; CuO-Cu2O-Cu; core shell tri-layer; nanowire based humidity sensor; oxidized wire; thermal annealing; Copper; Current measurement; Educational institutions; Humidity; Nanowires; Wires; Zinc oxide; CuO nanowire; humidity sensor;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2011.2180375
Filename
6107512
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