DocumentCode
1401591
Title
Photonic Device Layout Within the Foundry CMOS Design Environment
Author
Orcutt, Jason S. ; Ram, Rajeev J.
Author_Institution
Res. Lab. of Electron., Massachusetts Inst. of Technol., Cambridge, MA, USA
Volume
22
Issue
8
fYear
2010
fDate
4/15/2010 12:00:00 AM
Firstpage
544
Lastpage
546
Abstract
A design methodology to layout photonic devices within standard electronic complementary metal-oxide-semiconductor (CMOS) foundry data preparation flows is described. This platform has enabled the fabrication of designs in three foundry scaled-CMOS processes from two semiconductor manufacturers.
Keywords
CMOS integrated circuits; integrated optics; optical design techniques; optical fabrication; optical waveguides; design fabrication; electronic complementary metal-oxide-semiconductor; foundry CMOS design; optical waveguides; photonic device integration; photonic device layout; Complementary metal–oxide–semiconductor (CMOS) integrated circuits; design automation; optical device fabrication; optical planar waveguide components;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/LPT.2010.2041445
Filename
5404750
Link To Document