Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology

Author

Bogaerts, Wim ; Selvaraja, Shankar Kumar ; Dumon, Pieter ; Brouckaert, Joost ; De Vos, Katrien ; Van Thourhout, Dries ; Baets, Roel

Author_Institution

Dept. of Inf. Technol., Ghent Univ. & Interuniversity Microelectron. Center, Ghent, Belgium

Volume

16

Issue

1

fYear

2010

Firstpage

33

Lastpage

44

Abstract

We give an overview of recent progress in passive spectral filters and demultiplexers based on silicon-on-insulator photonic wire waveguides: ring resonators, interferometers, arrayed waveguide gratings, and echelle diffraction gratings, all benefit from the high-index contrast possible with silicon photonics. We show how the current generation of devices has improved crosstalk levels, insertion loss, and uniformity due to an improved fabrication process based on 193 nm lithography.

Keywords

CMOS integrated circuits; arrayed waveguide gratings; demultiplexing; nanolithography; optical filters; silicon-on-insulator; CMOS technology; Si; arrayed waveguide gratings; demultiplexers; echelle diffraction gratings; interferometers; nanolithography; passive spectral filters; photonic wire waveguides; ring resonators; silicon photonics; silicon-on-insulator; wavelength 193 nm; Arrayed waveguide gratings; CMOS technology; Crosstalk; Diffraction gratings; Interferometers; Optical ring resonators; Passive filters; Resonator filters; Silicon on insulator technology; Wire; Arrayed waveguide grating (AWG); echelle grating; nanophotonics; photonic wire; planar concave grating (PCG); ring resonator; silicon photonics; silicon-on-insulator (SOI);

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2009.2039680

Filename

5406283