Title :
Resonant tunneling displacement transducer
Author :
Vatannia, S. ; Schiano, J.L. ; Gidenblat, G. ; Ginsberg, M.D.
Author_Institution :
Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA
fDate :
7/1/1998 12:00:00 AM
Abstract :
We propose a new type of a tunneling displacement transducer. An electron energy filter quantum mechanically coupled to a conventional tunneling gap results in an improved ruggedness by enabling at least an order of magnitude increase in gap separation. This is achieved simultaneously with an increased sensitivity as compared to a more conventional electron tunneling transducer. We also show how the new transducer can be used in a force rebalance accelerometer
Keywords :
accelerometers; displacement measurement; microsensors; resonant tunnelling devices; transducers; electron energy filter; force rebalance accelerometer; quantum mechanical coupling; resonant tunneling displacement transducer; tunneling gap; Acceleration; Accelerometers; Electrodes; Electron guns; Insulation; Metal-insulator structures; Resonant tunneling devices; Structural beams; Surface contamination; Transducers;
Journal_Title :
Electron Devices, IEEE Transactions on
