DocumentCode :
1405149
Title :
PolyMethyl Methacrylate Thin-Film-Based Field Emission Microscope
Author :
Sun, Yonghai ; Jaffray, David A. ; Chen, Liang-Yih ; Yeow, John T W
Author_Institution :
Dept. of Syst. Design Eng., Univ. of Waterloo, Waterloo, ON, Canada
Volume :
11
Issue :
3
fYear :
2012
fDate :
5/1/2012 12:00:00 AM
Firstpage :
441
Lastpage :
443
Abstract :
A field emission microscope (FEM) is a useful tool for investigating molecular surface structures. Conventional FEMs suffer from poor image contrast level and low sensitivities when low-energy electron beams are applied. In this article, a new anode material is employed to improve the FEM imaging performance. We demonstrate that the device has the capability of clearly capturing images of facet boundaries of crystal structures at the tip of a zinc oxide (ZnO) nanowire as defect sites on a Polymethyl methacrylate (PMMA) film that is exposed to electron beams. The clear image of facet boundaries has not been reported in conventional FEM images.
Keywords :
II-VI semiconductors; field emission electron microscopy; nanowires; polymer films; thin film devices; wide band gap semiconductors; zinc compounds; FEM imaging performance; ZnO; anode material; crystal structure; defect sites; electron beams; facet boundaries; polymethyl methacrylate thin-film-based field emission microscope; zinc oxide nanowire; Cathodes; Crystals; Electron beams; Films; Finite element methods; Resists; Zinc oxide; Field emission microscope; polymethyl methacrylate (PMMA); zinc oxide;
fLanguage :
English
Journal_Title :
Nanotechnology, IEEE Transactions on
Publisher :
ieee
ISSN :
1536-125X
Type :
jour
DOI :
10.1109/TNANO.2011.2180735
Filename :
6111303
Link To Document :
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