Fabrication Error Analysis and Compensation for Guided-Mode Resonance Biosensor

Effects of the fabrication errors on typical double-layer guided-mode resonance filters were analyzed. The simulated results indicate that the grating period error mostly influences on the peak wavelength of biosensor. The grating period error was eliminated by adjusting the groove depth in the process of fabrication. A compensation example was given to illustrate the effectiveness of the compensations. The result shows that the peak wavelength has no deviation and the full-width at half-maximum changes slightly.