Photomodulated reflectance as a valuable nondestructive process tool for VCSELs

Author

Sale, T.E. ; Hosea, T.J.C. ; Thomas, P.J.S.

Author_Institution

Sch. of Phys. & Chem., Surrey Univ., Guildford, UK

Volume

12

Issue

10

fYear

2000

Firstpage

1328

Lastpage

1330

Abstract

Optical reflectivity spectra are useful in assessing the structure of vertical-cavity surface-emitting lasers (VCSELs) but show little of the nature of the active quantum well (QW). Here we use photomodulated reflectance to identify a region of an epitaxial wafer with optimal cavity-QW alignment. AlInGaP-AlGaAs visible VCSEL devices fabricated from this region lased well, compared with devices from a nearby control piece of the wafer which failed to lase at all.

Keywords

III-V semiconductors; aluminium compounds; gallium compounds; indium compounds; modulation spectroscopy; optical testing; quantum well lasers; reflectivity; semiconductor device testing; surface emitting lasers; AlInGaP-AlGaAs; AlInGaP-AlGaAs visible VCSEL devices; VCSELs; active quantum well; epitaxial wafer; optical reflectivity spectra; optimal cavity-QW alignment; photomodulated reflectance; valuable nondestructive process tool; vertical-cavity surface-emitting lasers; Fiber lasers; Marketing and sales; Mirrors; Optical surface waves; Quantum well lasers; Reflectivity; Semiconductor lasers; Stimulated emission; Surface emitting lasers; Vertical cavity surface emitting lasers;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.883819

Filename

883819