Microelectromechanical systems

Author

Gabriel, Kaigham J.

Author_Institution

Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA

Volume

86

Issue

8

fYear

1998

fDate

8/1/1998 12:00:00 AM

Firstpage

1534

Lastpage

1535

Abstract

The evolution and maturity of microelectromechanical systems (MEMS) in the coming years will be driven less by captive fabrication facilities and process development and more by innovative, aggressive electromechanical systems design. MEMS is poised to take full advantage of advances in information technology and couple them to advances in other disciplines to drive a fundamentally new approach to electromechanical system design and fabrication. By merging sensing and actuation with computation, MEMS will not only invest existing systems with enhanced capabilities and reliability but also will make possible radically new devices and systems designs that will exploit the miniaturization, multiplicity, and microelectronics of MEMS. For the first time, approaches akin to VLSI electronics can be taken to usher in an equally exciting and productive era of VLSI electromechanics

Keywords

micromechanical devices; MEMS; VLSI electromechanics; electromechanical systems design; information technology; microelectromechanical systems; Actuators; Displays; Electromechanical sensors; Fabrication; Information systems; Information technology; Microelectromechanical systems; Micromechanical devices; Paper technology; Very large scale integration;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/5.704257

Filename

704257