Micromachined devices for wireless communications

Author

Nguyen, Clark T -C ; Katehi, Linda P B ; Rebeiz, Gabriel M.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

86

Issue

8

fYear

1998

fDate

8/1/1998 12:00:00 AM

Firstpage

1756

Lastpage

1768

Abstract

An overview of recent progress in the research and development of micromachined devices for use in wireless communication subsystems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, micromachined low-loss microwave and millimeter-wave filters, low-loss micromechanical switches, microscale vibrating mechanical resonators with Q´s in the tens of thousands, and miniature antennas for millimeter-wave applications. Specific applications are reviewed for each of these components with emphasis on methods for miniaturization and performance enhancement of existing and further wireless transceivers

Keywords

micromachining; radio equipment; transceivers; integrated high-Q inductors; low-loss micromechanical switches; low-loss microwave filters; low-loss millimeter-wave filters; micromachined devices; microscale vibrating high-Q mechanical resonators; miniature millimeter-wave antennas; transceivers; tunable capacitors; wireless communications; Capacitors; Inductors; Micromechanical devices; Microwave devices; Microwave filters; Millimeter wave communication; Millimeter wave technology; Research and development; Resonator filters; Wireless communication;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/5.704281

Filename

704281