• DocumentCode
    1407497
  • Title

    SILC-related effects in flash E2PROM´s-Part II: Prediction of steady-state SILC-related disturb characteristics

  • Author

    De Blauwe, Jan ; van Heudt, J. ; Wellekens, Dirk ; Groeseneken, Guido ; Maes, Herman E.

  • Author_Institution
    IMEC, Leuven, Belgium
  • Volume
    45
  • Issue
    8
  • fYear
    1998
  • fDate
    8/1/1998 12:00:00 AM
  • Firstpage
    1751
  • Lastpage
    1760
  • Abstract
    For Part I see J. de Blauwe et al., vol.45, no.8, pp.1745-50 (1998). In this paper, a new methodology is developed, and applied thereafter, to predict the disturb characteristics of an arbitrary Flash E2PROM device which are related to steady-state stress induced leakage current (SILC). This prediction methodology is based on a quantitative model for steady-state SILC, which has been developed on capacitors and nFET´s as was reported earlier in Part I. Here, this model is shown to be also valid for tunnel oxide Flash E2PROM devices, and used thereafter in a consistent and well-understood cell optimization procedure. The model requires as only input basic cell parameters and an oxide qualification obtained at the capacitor and transistor level
  • Keywords
    EPROM; integrated circuit modelling; integrated memory circuits; leakage currents; tunnelling; cell optimization; disturb characteristics; flash E2PROM; quantitative model; steady-state SILC; stress induced leakage current; tunnel oxide; Dielectrics; Electrons; Extrapolation; Leakage current; Nonvolatile memory; PROM; Predictive models; Steady-state; Stress; Tunneling;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.704375
  • Filename
    704375