• DocumentCode
    140819
  • Title

    Three-dimensional, flexible graphene bioelectronics

  • Author

    SungGyu Chun ; JongHyun Choi ; Ashraf, A. ; Sungwoo Nam

  • Author_Institution
    Dept. of Mech. Sci. & Eng., Univ. of Illinois, Urbana-Champaign, Champaign, IL, USA
  • fYear
    2014
  • fDate
    26-30 Aug. 2014
  • Firstpage
    5268
  • Lastpage
    5271
  • Abstract
    We report 3-dimensional (3D) graphene-based biosensors fabricated via 3D transfer of monolithic graphene-graphite structures. This mechanically flexible all-carbon structure is a prospective candidate for intimate 3D interfacing with biological systems. Monolithic graphene-graphite structures were synthesized using low pressure chemical vapor deposition (LPCVD) process relying on the heterostructured metal catalyst layers. Nonplanar substrates and wet-transfer method were used with a thin Au film as a transfer layer to achieve the 3D graphene structure. Instead of the typical wet-etching method, vapor-phase etching was performed to minimize the delamination of the graphene while removing the transfer layer. We believe that the monolithic graphene-graphite synthesis combined with the conformal 3D transfer will pave the way for the 3D conformal sensing capability as well as the intracellular recording of living cells in the future.
  • Keywords
    biosensors; chemical vapour deposition; etching; flexible electronics; gold; graphene; graphite; 3D graphene structure; 3D graphene-based biosensors; 3D transfer; LPCVD process; all-carbon structure; biological systems; flexible graphene bioelectronics; heterostructured metal catalyst layers; intracellular recording; living cells; low pressure chemical vapor deposition process; monolithic graphene-graphite structures; nonplanar substrates; thin gold film; vapor-phase etching; wet-etching method; wet-transfer method; Field effect transistors; Graphene; Metals; Nanobioscience; Substrates; Three-dimensional displays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Engineering in Medicine and Biology Society (EMBC), 2014 36th Annual International Conference of the IEEE
  • Conference_Location
    Chicago, IL
  • ISSN
    1557-170X
  • Type

    conf

  • DOI
    10.1109/EMBC.2014.6944814
  • Filename
    6944814