Emission properties of Spindt-type cold cathodes with different emission cone material

Author

Djubua, B.C. ; Chubun, N.N.

Author_Institution

ISTOK R & P Corp., Fryazino, USSR

Volume

38

Issue

10

fYear

1991

fDate

10/1/1991 12:00:00 AM

Firstpage

2314

Lastpage

2316

Abstract

Emission properties of thin film field emission array cathodes with molybdenum, hafnium, diamond-like carbon, and lanthanum hexaboride cones were investigated. Each array consisted of 681 holes and cones (microcells), spaced on 10-μm centers on a silicon substrate. At work functions of more than 5 eV carbon cones had the lowest operating voltage-less than 50 V-due to the high value of the form factor of the cones, which have a sharp ribbed pyramidal shape. However, high current density was not achieved with such cathodes because of the low conductance of this type of diamond-like carbon. Different approaches to increase transconductance provided by one cell are discussed

Keywords

cathodes; electron field emission; thin film devices; vacuum microelectronics; 5 eV; 50 V; C; Hf; LaB₆; Mo; Si substrate; Spindt-type; cold cathodes; conductance; emission cone material; emission properties; field emission array cathodes; sharp ribbed pyramidal shape; thin film; transconductance; Carbon dioxide; Cathodes; Diamond-like carbon; Hafnium; Lanthanum; Microcell networks; Silicon; Substrates; Transistors; Voltage;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.88516

Filename

88516