• DocumentCode
    1408234
  • Title

    Dynamic behavior and instability of field emitter surfaces

  • Author

    Tsong, Tien T.

  • Author_Institution
    Dept. of Phys., Pennsylvania State Univ., University Park, PA, USA
  • Volume
    38
  • Issue
    10
  • fYear
    1991
  • fDate
    10/1/1991 12:00:00 AM
  • Firstpage
    2317
  • Lastpage
    2319
  • Abstract
    The instability of field emission current arises from the atomic changes of the field emitter surface which can be induced by the sputtering of the secondary ions, by surface diffusion of containment atoms, and by the dynamical behavior of the emitter surface itself. There are three major causes of the instability: (1) the ion-bombardment- or ion-sputtering-induced surface changes, (2) contamination and surface diffusion of contaminant-induced emission current fluctuations, and (3) the intrinsic thermal instability of the field emitter surface itself. A few possible means of alleviating these problems are discussed
  • Keywords
    electron field emission; vacuum microelectronics; atomic changes; contamination; emission current fluctuations; instability of field emission current; instability of field emitter surfaces; intrinsic thermal instability; ion sputtering; stabilisation; surface diffusion of containment atoms; Atomic layer deposition; Current-voltage characteristics; Electron emission; Field emitter arrays; Fluctuations; Impurities; Microelectronics; Sputtering; Stability; Surface contamination;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.88517
  • Filename
    88517