Simulation of geometrical change effects on electrical characteristics of micrometer-size vacuum triode with field emitters

Author

Asano, Tanemasa

Author_Institution

Dept. of Comput. Sci. & Electron., Kyushu Inst. of Technol., Iizuka, Fukuoka, Japan

Volume

38

Issue

10

fYear

1991

fDate

10/1/1991 12:00:00 AM

Firstpage

2392

Lastpage

2394

Abstract

Change in the electrical characteristic of a micro-vacuum triode with a field electron emitter, due to a change in physical dimension which may appear in the fabrication process, has been simulated. It has been found that the variation of the grid opening size more strongly affects the electrical characteristics of the triodes than the misalignment between the emitter tip and the center of the grid opening. It has also been found, however, that such effect can be minimized by biasing the grid at a proper voltage. Effects of grid position relative to the emitter tip have been also investigated in order to find better device geometry for high-frequency applications

Keywords

digital simulation; electron field emission; electronic engineering computing; triodes; vacuum microelectronics; change in physical dimension; device geometry; electrical characteristics; fabrication errors; field electron emitter; field emitters; geometrical change effects; grid bias; grid opening variation; grid position relative; high-frequency applications; micro-vacuum triode; micrometer-size vacuum triode; misalignment sensitivity analysis; Anodes; Argon; Computational modeling; Electric fields; Electric variables; Electron emission; Electron guns; Fabrication; Solid modeling; Voltage;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.88532

Filename

88532