Title :
Editorial Introduction To The Special Section On Petri Nets In Semiconductor Manufacturing
Author :
Mu Der Jeng ; Mengchu Zhou
Author_Institution :
National Taiwan Ocean University
Keywords :
Fabrication; Integrated circuit modeling; Job shop scheduling; Manufacturing automation; Manufacturing systems; Petri nets; Routing; Semiconductor device manufacture; Semiconductor device modeling; Virtual manufacturing;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.1998.705369
