DocumentCode
1409423
Title
Editorial Introduction To The Special Section On Petri Nets In Semiconductor Manufacturing
Author
Mu Der Jeng ; Mengchu Zhou
Author_Institution
National Taiwan Ocean University
Volume
11
Issue
3
fYear
1998
Firstpage
330
Lastpage
332
Keywords
Fabrication; Integrated circuit modeling; Job shop scheduling; Manufacturing automation; Manufacturing systems; Petri nets; Routing; Semiconductor device manufacture; Semiconductor device modeling; Virtual manufacturing;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.1998.705369
Filename
705369
Link To Document