Title :
Semiconductor thickness and back-gate voltage effects on the gate tunnel current in the MOS/SOI system with an ultrathin oxide
Author :
Majkusiak, Bogdan ; Badri, Mohamed H.
Author_Institution :
Inst. of Microelectron. & Optoelectron., Warsaw Univ. of Technol., Poland
fDate :
12/1/2000 12:00:00 AM
Abstract :
The effects of the semiconductor layer thickness and the back-gate voltage on the current-voltage (I-V) characteristics of the MOS/SOI tunnel diode with an aluminum gate and n-type semiconductor layers are theoretically investigated. If the semiconductor thickness is reduced or the back-gate voltage is more negative, the total thermal generation current decreases and the gate-oxide thickness critical for transition from the quasiequilibrium strong inversion state to the nonequilibrium state increases. If the MOS/SOI tunnel diode is in the transition range between the nonequilibrium and quasiequilibrium states, a positive increase of the back-gate voltage VBG results in a strong increase of the majority carrier tunnel current. This back-gate effect may be exploited in more functional devices based on the MOS/SOI tunnel diode.
Keywords :
MIS devices; aluminium; elemental semiconductors; semiconductor device models; silicon; silicon compounds; silicon-on-insulator; tunnel diodes; Al-SiO-Si; I-V characteristics; MOS/SOI system; back-gate voltage; critical thickness; gate tunnel current; majority carrier tunnel current; nonequilibrium state; quasiequilibrium strong inversion state; semiconductor layer thickness; thermal generation current; tunnel diode; ultrathin oxide; Aluminum; Electrodes; Helium; Leakage current; MOS devices; MOSFETs; Semiconductor diodes; Substrates; Tunneling; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on