DocumentCode :
1411238
Title :
An extremely fine line
Author :
Palmer, Katie M.
Volume :
49
Issue :
1
fYear :
2012
fDate :
1/1/2012 12:00:00 AM
Firstpage :
47
Lastpage :
50
Abstract :
Moore´s Law needs a hero. This year, we´ll see if the chip business´s designated savior-extreme ultraviolet (EUV) lithography- is really up to the task. After decades of bringing us the incredible shrinking transistor, chipmakers are now hard up against the limits of their printing technique: Trying to use today´s ultraviolet lasers to print the next generation of circuits would be like trying to trace a fine line with a preschooler´s crayon.
Keywords :
transistors; ultraviolet lithography; Moore´s Law; chip business; chipmakers; extreme ultraviolet lithography; printing technique; shrinking transistor; Lithography; Moore´s Law; Photonics; Ultraviolet sources;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.2012.6117838
Filename :
6117838
Link To Document :
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