Title :
Materials science of microelectromechanical systems (MEMS) devices, vol. 546 [Book Reviews]
Keywords :
Book reviews; Dielectric constant; Dielectric materials; Fabrication; Materials science and technology; Mechanical factors; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Semiconductor materials;
Journal_Title :
Electrical Insulation Magazine, IEEE
DOI :
10.1109/MEI.2000.887603
