Design and Development of Multi-Die Laterally Placed and Vertically Stacked Embedded Micro-Wafer-Level Packages

Two embedded micro-wafer-level packages (EMWLP) with 1) laterally placed and 2) vertically stacked thin dies are designed and developed. Three-dimensional stacking of thin dies is demonstrated as progressive miniaturization driver for multi-chip EMWLP. Both the developed packages have dimensions of 10 mm × 10 mm × 0.4 mm and solder ball pitch of 0.4 mm. As part of the development several key processes like thin die stacking, 8-in wafer encapsulation using compression molding, low-temperature dielectric with processing temperature less than 200°C have been developed. The EMWLP components success fully pass 1000 air to air thermal cycling (-40°C to 125°C), unbiased highly accelerated stress testing (HAST) and moisture sensitivity level (MSL3) tests. Developed EMWLP also show good board level TC (>; 1000 cycles) and drop test reliability results. Integration of thin film passives like inductors and capacitors are also demonstrated on EMWLP platform. Developed thin film passives show a higher Q-factor when compared to passives on high resistivity silicon platform. Thermo-mechanical simulation studies on developed EMWLP demonstrate that systemic control over die, RDL, and package thicknesses can lead to designs with improved mechanical reliability.