Title :
Rule Induction for Identifying Multilayer Tool Commonalities
Author :
Borisov, Alexander ; Chikalov, Igor ; St. Pierre, Eric ; Tuv, Eugene
Author_Institution :
Intel Corp., Chandler, AZ, USA
fDate :
5/1/2011 12:00:00 AM
Abstract :
A methodology based on association rule concepts is given for detecting fab tool commonality of affected lots. The performance of the methodology is then compared to several traditional methods such as ANOVA and contingency tables using eight actual production cases. In each case, the offending tool is affecting lots at multiple process layers.
Keywords :
multilayers; statistical analysis; tools; ANOVA; association rule concepts; fab tool commonality; multilayer tool commonality; Algorithm design and analysis; Analysis of variance; Association rules; Databases; Fault diagnosis; Production; Radio access networks; Data mining; rule induction; tool commonality;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2010.2102053
