• DocumentCode
    1411783
  • Title

    Rule Induction for Identifying Multilayer Tool Commonalities

  • Author

    Borisov, Alexander ; Chikalov, Igor ; St. Pierre, Eric ; Tuv, Eugene

  • Author_Institution
    Intel Corp., Chandler, AZ, USA
  • Volume
    24
  • Issue
    2
  • fYear
    2011
  • fDate
    5/1/2011 12:00:00 AM
  • Firstpage
    197
  • Lastpage
    201
  • Abstract
    A methodology based on association rule concepts is given for detecting fab tool commonality of affected lots. The performance of the methodology is then compared to several traditional methods such as ANOVA and contingency tables using eight actual production cases. In each case, the offending tool is affecting lots at multiple process layers.
  • Keywords
    multilayers; statistical analysis; tools; ANOVA; association rule concepts; fab tool commonality; multilayer tool commonality; Algorithm design and analysis; Analysis of variance; Association rules; Databases; Fault diagnosis; Production; Radio access networks; Data mining; rule induction; tool commonality;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2010.2102053
  • Filename
    5674125
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1411783