Title :
Self-assembled 3-D silicon microscanners with self-assembled electrostatic drives
Author :
Syms, Richard R A
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
Abstract :
Three-dimensional, electrostatically driven resonant torsion mirror microscanners are constructed by surface tension powered out-of-plane rotation of parts formed in bonded silicon-on-insulator. Simultaneous self-assembly of the fixed electrodes using a below-substrate limiter mechanism allows scanning perpendicular to the assembly axis, and direct drive allows high-Q operation.
Keywords :
electrostatic devices; micro-optics; mirrors; optical scanners; self-assembly; silicon; silicon-on-insulator; 3D electrostatically driven resonant torsion mirror microscanners; Si; assembly axis; below-substrate limiter mechanism; bonded silicon-on-insulator; fixed electrodes; high-Q operation; out-of-plane rotation; scanning perpendicular; self-assembled 3-D silicon microscanners; self-assembled electrostatic drives; self-assembly; surface tension; Assembly; Bonding; Electrodes; Electrostatics; Mirrors; Optical beams; Resonance; Self-assembly; Silicon on insulator technology; Surface tension;
Journal_Title :
Photonics Technology Letters, IEEE
