• DocumentCode
    1412488
  • Title

    Process monitoring of spin-valve GMR deposition

  • Author

    Kools, J.C.S. ; Paranjpe, A.P. ; Schwartz, P.V. ; Bubber, R. ; Bergner, B. ; Kula, W. ; Rijks, Th.G.S.M.

  • Author_Institution
    CVC, Fremont, CA, USA
  • Volume
    34
  • Issue
    4
  • fYear
    1998
  • fDate
    7/1/1998 12:00:00 AM
  • Firstpage
    945
  • Lastpage
    947
  • Abstract
    A phenomenological description of the conductance of a spin-valve structure is developed and compared to numerical solutions for the Boltzmann equation. Based on the phenomenological description, a method is presented to measure the controllability of physical vapor deposition of sub-100 Å Cu films with better than 0.5 Å accuracy
  • Keywords
    Boltzmann equation; Permalloy; copper; giant magnetoresistance; magnetic multilayers; vapour deposition; Boltzmann equation; Cu-NiFe; giant magnetoresistance; phenomenological description; physical vapor deposition; spin-valve structure; Antiferromagnetic materials; Automatic control; Conductivity; Controllability; Electrons; Magnetic heads; Magnetic materials; Measurement standards; Monitoring; Nonhomogeneous media;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.706322
  • Filename
    706322
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1412488