Title :
Optimization of the driving circuit for material processing with a pulsed-glow discharge
Author :
Cesa, Yanina ; Mingolo, Nélida ; Martínez, Oscar Eduardo
Author_Institution :
Lab. de Haces Dirigidos, Buenos Aires Univ., Argentina
fDate :
6/1/2000 12:00:00 AM
Abstract :
The effect of including an inductance in the circuit of a glow-discharge-pulsed electron gun for materials processing is analyzed. Due to the particular nonlinear behavior of the current vs. voltage in these guns, and the strong nonlinear self-focusing of the beam, the adequate shaping of the temporal profile of the discharge becomes relevant to the efficiency of the system. A critical damping value for the inductance is obtained and within the range of practical interest, analytical expressions are derived for the required inductance, capacitance and source voltage for a given peak power, pulse duration, gas pressure, and pulse shape. The efficiency increase with the improved design is also discussed.
Keywords :
driver circuits; glow discharges; optimisation; plasma materials processing; capacitance; current-voltage characteristics; discharge temporal profile shaping; driving circuit optimisation; efficiency; gas pressure; glow discharge pulsed electron gun; inductance; material processing; nonlinear behavior; nonlinear self-focusing; peak power; pulse duration; pulse shape; pulsed glow discharge; source voltage; surface treatment; Capacitance; Damping; Electrons; Fault location; Guns; Inductance; Materials processing; Pulse circuits; Pulse shaping methods; Voltage;
Journal_Title :
Plasma Science, IEEE Transactions on
