• DocumentCode
    1413021
  • Title

    Experimental and theoretical characterization of delta-doped quantum well field-effect transistors grown by gas-source molecular-beam epitaxy

  • Author

    Kuo, T.Y. ; Cunningham, John E. ; Schubert, E. Fred ; Tsang, W.T. ; Chiu, T.H. ; Ren, Fengyuan ; Timp, Gregory ; Fonstad, C.G.

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA
  • Volume
    35
  • Issue
    12
  • fYear
    1988
  • fDate
    12/1/1988 12:00:00 AM
  • Firstpage
    2449
  • Lastpage
    2450
  • Abstract
    An experimental and theoretical study has been made of a delta-doped quantum well field-effect transistor, (δQWFET), that realizes for the first time the high two-dimensional electron gas concentration, transconductance, saturation current density, and DC gain, and the very low output conductance that are expected for this device. The structure is made unique by the presence of quantum size effects that occur in both delta-doped barriers and the quantum well. The quantum size effects in the barriers and well can thus be tailored independently to suit specific FET requirements while still maintaining the advantage of a spatially confined electron gas. A complete DC characterization of this structure has been carried out using capacitance-voltage, Shubnikov-de Haas, and variable-temperature Hall measurements. A model incorporating quantum size effects has been developed and used as a basis for calculations
  • Keywords
    field effect transistors; molecular beam epitaxial growth; semiconductor device models; semiconductor doping; semiconductor quantum wells; C-V measurements; DC characterization; DC gain; FET; MBE; Shubnikov-de Haas measurements; delta-doped quantum well; field-effect transistors; gas-source molecular-beam epitaxy; low output conductance; model; quantum size effects; saturation current density; transconductance; two-dimensional electron gas; variable-temperature Hall measurements; Doping profiles; Dry etching; FETs; Gallium arsenide; Geometry; Ion implantation; Leakage current; MESFETs; Quantum mechanics; Transconductance;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.8879
  • Filename
    8879