DocumentCode
1413021
Title
Experimental and theoretical characterization of delta-doped quantum well field-effect transistors grown by gas-source molecular-beam epitaxy
Author
Kuo, T.Y. ; Cunningham, John E. ; Schubert, E. Fred ; Tsang, W.T. ; Chiu, T.H. ; Ren, Fengyuan ; Timp, Gregory ; Fonstad, C.G.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA
Volume
35
Issue
12
fYear
1988
fDate
12/1/1988 12:00:00 AM
Firstpage
2449
Lastpage
2450
Abstract
An experimental and theoretical study has been made of a delta-doped quantum well field-effect transistor, (δQWFET), that realizes for the first time the high two-dimensional electron gas concentration, transconductance, saturation current density, and DC gain, and the very low output conductance that are expected for this device. The structure is made unique by the presence of quantum size effects that occur in both delta-doped barriers and the quantum well. The quantum size effects in the barriers and well can thus be tailored independently to suit specific FET requirements while still maintaining the advantage of a spatially confined electron gas. A complete DC characterization of this structure has been carried out using capacitance-voltage, Shubnikov-de Haas, and variable-temperature Hall measurements. A model incorporating quantum size effects has been developed and used as a basis for calculations
Keywords
field effect transistors; molecular beam epitaxial growth; semiconductor device models; semiconductor doping; semiconductor quantum wells; C-V measurements; DC characterization; DC gain; FET; MBE; Shubnikov-de Haas measurements; delta-doped quantum well; field-effect transistors; gas-source molecular-beam epitaxy; low output conductance; model; quantum size effects; saturation current density; transconductance; two-dimensional electron gas; variable-temperature Hall measurements; Doping profiles; Dry etching; FETs; Gallium arsenide; Geometry; Ion implantation; Leakage current; MESFETs; Quantum mechanics; Transconductance;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.8879
Filename
8879
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