Title :
Improved magnetic anisotropy and magnetostriction by laminating FeAl(N) with Permalloy to multilayers
Author :
Maass, W. ; Rohrmann, H.
Author_Institution :
Balzers Process Syst., Alzenau, Germany
fDate :
7/1/1998 12:00:00 AM
Abstract :
High Bs FeAl(N) single and FeAl(N)/NiFe multilayer films have been prepared by RF-diode sputtering in a Ar/N2 mixture on substrates up to 6" diameter using a commercial sputter machine. Preparing the films under an aligning magnetic field led to an uniaxial anisotropy with angular dispersions less than 1°. A magnetostriction of λs⩽1*10-6 and HC, HK ≈2.5 Oe was achieved for single films. The FeAl(N)/NiFe multilayers display an improved anisotropic behaviour and smaller HC and λs although Bs is only somewhat below the α-Fe value. Depending on layer periodicity, HK varies between 2.3 and 6 Oe for 0.5 μm thick films
Keywords :
Permalloy; aluminium alloys; iron alloys; magnetic anisotropy; magnetic hysteresis; magnetic multilayers; magnetostriction; sputter deposition; Ar/N2 mixture; FeAlN-NiFe; RF-diode sputtering; laminating; layer periodicity; magnetic anisotropy; magnetostriction; multilayers; uniaxial anisotropy; Anisotropic magnetoresistance; Argon; Displays; Magnetic anisotropy; Magnetic fields; Magnetic films; Magnetic multilayers; Magnetostriction; Sputtering; Thick films;
Journal_Title :
Magnetics, IEEE Transactions on
