Title :
Fabrication and characterization of contiguous permanent magnet junctions
Author :
Xiao, Min ; Devasahayam, Adrian J. ; Kryder, Mark H.
Author_Institution :
Data Storage Syst. Center, Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
7/1/1998 12:00:00 AM
Abstract :
This paper addresses several important issues concerning contiguous permanent magnet biased magneto-resistive sensors. A fabrication process utilizing isotropically etched silicon nitride for lift-off is described, and the optimization of the permanent magnet materials is presented. From the study of resistance vs. trackwidth and sensor height, a component of the resistance inversely proportional to the sensor height is identified. The effective longitudinal bias field is found to decrease with increasing trackwidth
Keywords :
magnetic heads; magnetic recording; magnetic sensors; magnetoresistive devices; permanent magnets; Si3N4; contiguous permanent magnet biased magneto-resistive sensors; effective longitudinal bias field; fabrication; fabrication process; isotropically etched silicon nitride; lift-off; magnetic recording; permanent magnet materials; sensor height; trackwidth; Etching; Fabrication; Lithography; Magnetic materials; Magnetic sensors; Milling; Permanent magnets; Resists; Sensor phenomena and characterization; Silicon compounds;
Journal_Title :
Magnetics, IEEE Transactions on
