DocumentCode
1414177
Title
Nanomechanical properties of CNx overcoats and cathodic arc carbon (CAC) films
Author
Hsiao, Raymond C. ; Bogy, David B. ; Bhatia, C.Singh
Author_Institution
Comput. Mech. Lab., California Univ., Berkeley, CA, USA
Volume
34
Issue
4
fYear
1998
fDate
7/1/1998 12:00:00 AM
Firstpage
1720
Lastpage
1722
Abstract
The nano-wear behavior of nitrogenated carbon films that were deposited on disks at various bras was studied. It was found that the deposition bias played an important role In determining nanomechanical properties of CNx films. Nano-indentation and wear tests were also performed on a cathodic arc carbon (CAC) film for which the mechanical properties vary along the thickness direction
Keywords
carbon; carbon compounds; magnetic disc storage; nanostructured materials; plasma arc sprayed coatings; wear resistant coatings; wear testing; C; CAC film; CN; CNx overcoats; cathodic arc carbon films; deposition bias; disks; magnetic disks; mechanical properties; nano-indentation; nano-wear behavior; nanomechanical properties; nitrogenated carbon films; wear tests; Adhesives; Electrical resistance measurement; Filters; Scanning probe microscopy; Semiconductor films; Substrates; Surface cracks; Surface topography; Testing; Voltage;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.706683
Filename
706683
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