DocumentCode
1414678
Title
Theoretical study of method based on ellipsometry for measurement of complex permittivity of materials
Author
Sagnard, F. ; Bentabet, F. ; Vignat, C.
Author_Institution
Lab. Syst. de Commun., Marne-La-Vallee, France
Volume
36
Issue
22
fYear
2000
fDate
10/26/2000 12:00:00 AM
Firstpage
1843
Lastpage
1845
Abstract
A new approach, based on ellipsometry and adapted to microwave frequencies, is presented for the in situ measurement of the complex permittivity of materials. The work serves to characterise the accuracy and the sensitivity of the method
Keywords
permittivity measurement; complex permittivity measurement; ellipsometry based technique; in situ measurement; microwave frequencies; sensitivity;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20001313
Filename
888423
Link To Document